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Your selections:
Design and control of a single-chip SOI-MEMS atomic force microscope
- Maroufi, Mohammad, Ruppert, Michael G., Fowler, Anthony G., Moheimani, S. O. Reza
Design, fabrication and characterization of a high-bandwidth 2DOF MEMS nanopositioner
- Maroufi, M., Moheimani, S. O. R.
Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor
- Piriyanont, Busara, Moheimani, S. O. Reza
A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM
- Fowler, A. G., Laskovski, A. N., Hammond, A. C., Moheimani, S. O. R.
A low-loss MEMS tunable capacitor with movable dielectric
- Zhu, Y., Yuce, M. R., Moheimani, S. O. R.
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